Integrated memory assemblies comprising multiple memory array decks

ABSTRACT

Some embodiments include an integrated memory assembly having a first memory array deck over a second memory array deck. A first series of conductive lines extends across the first memory array deck, and a second series of conductive lines extends across the second memory array deck. A first conductive line of the first series and a first conductive line of the second series are coupled with a first component through a first conductive path. A second conductive line of the first series and a second conductive line of the second series are coupled with a second component through a second conductive path. The first and second conductive lines of the first series extend through first isolation circuitry to the first and second conductive paths, respectively; and the first and second conductive lines of the second series extend through second isolation circuitry to the first and second conductive paths, respectively.

RELATED PATENT DATA

This patent resulted from a continuation of U.S. patent application Ser.No. 15/797,462 which was filed Oct. 30, 2017, which claims priority toU.S. Provisional Patent Application Ser. No. 62/452,193, which was filedJan. 30, 2017, each of which are hereby incorporated by reference.

TECHNICAL FIELD

Integrated memory assemblies comprising multiple memory array decks.

BACKGROUND

Memory is utilized in modern computing architectures for storing data.One type of memory is Dynamic Random Access Memory (DRAM). DRAM mayprovide advantages of structural simplicity, low cost and high speed incomparison to alternative types of memory.

DRAM may utilize memory cells each having one capacitor in combinationwith one transistor (so-called 1T-1C memory cells), with the capacitorbeing coupled with a source/drain region of the transistor. An example1T-1C memory cell 2 is shown in FIG. 1, with the transistor labeled Tand the capacitor labeled C. The capacitor has one node coupled with asource/drain region of the transistor, and another node coupled with acommon plate, CP. The common plate may be coupled with any suitablevoltage, such as a voltage within a range of from greater than or equalto ground to less than or equal to VCC (i.e., ground≤CP≤VCC). In someapplications, the common plate is at a voltage of about one-half VCC(i.e., about VCC/2). The transistor has a gate coupled to a wordline WL(i.e., access line), and has a source/drain region coupled to a bitlineBL (i.e., digit line or sense line). In operation, an electrical fieldgenerated by voltage along the wordline may gatedly couple the bitlineto the capacitor during read/write operations.

Another prior art memory cell 1T-1C memory cell configuration is shownin FIG. 2. The configuration of FIG. 2 shows two memory cells 2 a and 2b; with memory cell 2 a comprising a transistor T1 and a capacitor C1,and with memory cell 2 b comprising a transistor T2 and a capacitor C2.Wordlines WL0 and WL1 are electrically coupled with the gates oftransistors T1 and T2, respectively. A connection to a bitline BL isshared by the memory cells 2 a and 2 b.

Another prior art memory cell configuration utilizes two transistors incombination with one capacitor. Such configuration may be referred to asa 2T-1C memory cell. A 2T-1C memory cell 4 is schematically illustratedin FIG. 3. The two transistors are labeled T1 and T2; and may bereferred to as first and second transistors, respectively. The capacitoris labeled C.

A source/drain region of the first transistor T1 connects with a firstnode of the capacitor C, and the other source/drain region of the firsttransistor T1 connects with a first comparative bitline (BL-T). A gateof the first transistor T1 connects with a wordline WL. A source/drainregion of the second transistor T2 connects with a second node of thecapacitor C, and the other source/drain region of the second transistorT2 connects with a second comparative bitline BL-C. A gate of the secondtransistor T2 connects with the wordline WL.

The comparative bitlines BL-T and BL-C extend to a sense amplifier SAwhich compares electrical properties (e.g., voltage) of the two toascertain a memory state of memory cell 4. The bitline BL-T may bereferred to as a true bitline, and the bitline BL-C may be referred toas a complementary bitline. The terms “true” and “complementary” arearbitrary, and merely indicate that the bitline values of BL-T and BL-Care to be compared to one another.

Another prior art memory cell configuration utilizes two capacitors incombination with two transistors. Such configuration may be referred toas a 2T-2C memory cell. A 2T-2C memory cell 6 is schematicallyillustrated in FIG. 4. The two transistors of the memory cell arelabeled T1 and T2, and may be referred to as first and secondtransistors, respectively. The two capacitors are labeled C1 and C2, andmay be referred to as first and second capacitors, respectively.

A source/drain region of the first transistor T1 connects with a node ofthe first capacitor C1, and the other source/drain region of the firsttransistor T1 connects with a first comparative bitline BL-T. A gate ofthe first transistor T1 connects with a wordline WL. A source/drainregion of the second transistor T2 connects with a node of the secondcapacitor C2, and the other source/drain region of the second transistorT2 connects with a second comparative bitline BL-C. A gate of the secondtransistor T2 connects with the wordline WL. Each of the first andsecond capacitors C1 and C2 has a node electrically coupled with acommon plate CP.

The comparative bitlines BL-T and BL-C extend to a sense amplifier SAwhich compares electrical properties (e.g., voltage) of the two toascertain a memory state of memory cell 6.

Another prior art memory cell configuration utilizes three transistorsin combination with one capacitor. Such configuration may be referred toas a 3T-1C memory cell. A 3T-1C memory cell 8 is schematicallyillustrated in FIG. 5. The three transistors of the memory cell arelabeled T1, T2 and T3; and may be referred to as first, second and thirdtransistors, respectively. The capacitor is labeled C.

A source/drain region of the first transistor T1 connects with a writebitline WBL, and the other source/drain region of the first transistorT1 connects with the capacitor C. A gate of the first transistor T1connects with a write wordline WWL.

A source/drain region of the second transistor T2 connects with a commonplate CP, and the other source/drain region of the second transistor T2connects with a source/drain region of the third transistor T3.

A gate of the second transistor T2 connects with the capacitor C.

One of the source/drain regions of the third transistor T3 is thesource/drain region connected with the source/drain region of the secondtransistor T2, and the other connects with a read bitline RBL. A gate ofthe third transistor T3 connects with a read wordline RWL.

The memory cells of FIGS. 1-5 may be incorporated into memory arrays.The 1T-1C memory cells of FIGS. 1 and 2 may be utilized in memory arrayshaving open bitline arrangements, with the open bitline arrangementshaving paired bitlines which are compared with sense amplifiers. Anexample DRAM array 9 having open bitline architecture is shown in FIG.6. The DRAM array 9 includes memory cells of the type described in FIG.2 (not labeled in FIG. 6 in order to simplify the drawing), wordlines,WL(0-7), and comparative bitlines. The comparative bitlines include afirst set BL-T(1-9), and a second set BL-C(1-9). Electrical propertiesof bitlines from the first set are compared with electrical propertiesof bitlines from the second set utilizing sense amplifiers, SA(1-9). Thewordlines are coupled with wordline drivers.

It would be desirable to incorporate memory into three-dimensionalarrangements having stacked memory array decks (i.e., tiers). However,such can be complicated due to wiring associated with each memory arraydeck needing to be extended to circuitry peripheral to the memory arraydeck. For instance, bitlines may need to extend sense amplifiers and/orother peripheral circuitry; and wordlines may need to extend to wordlinedrivers and/or other peripheral circuitry. It would be desirable todevelop wiring arrangements (e.g., bitline/wordline arrangements)suitable for utilization with stacked memory array decks.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram of a prior art memory cell having 1transistor and 1 capacitor.

FIG. 2 is a schematic diagram of a pair of prior art memory cells whicheach have 1 transistor and 1 capacitor, and which share a bitlineconnection.

FIG. 3 is a schematic diagram of a prior art memory cell having 2transistors and 1 capacitor.

FIG. 4 is a schematic diagram of a prior art memory cell having 2transistors and 2 capacitors.

FIG. 5 is a schematic diagram of a prior art memory cell having 3transistors and 1 capacitor.

FIG. 6 is a schematic diagram of a prior art DRAM array having openbitline architecture.

FIG. 7 is a schematic diagram of an example integrated memory assemblyhaving multiple memory array decks.

FIGS. 8-13 are schematic diagrams of regions of the example integratedmemory assembly of FIG. 7.

FIG. 14 is a schematic diagram of an example integrated memory assemblyhaving multiple memory array decks.

FIGS. 15-24 are diagrammatic cross-sectional views of example integratedmemory assemblies having multiple memory array decks.

DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS

Some embodiments include new architectures having stacked memory arraydeck arrangements. The new architectures may enable bitlines fromdifferent memory array decks to share conductive paths to senseamplifiers and/or may enable wordlines from different memory array decksto share conductive paths to wordline drivers. The new architectures mayinclude isolation devices which enable some memory array decks of thestack to be isolated while another memory array deck of the stack isoperated (e.g., subjected to read/write applications). Exampleembodiments are described with reference to FIGS. 7-24.

Referring to FIG. 7, an example integrated memory assembly 10 isillustrated. The assembly 10 comprises three decks, which are labeled asDECK-A, DECK-B and DECK-C. The decks comprise memory arrays, and may bereferred to as memory array decks. Although three stacked decks areillustrated, in practice the assembly may comprise more than threestacked decks, or may comprise only two stacked decks. The stacked decksmay be supported by an underlying base (not shown in FIG. 7). Such basemay comprise, for example, monocrystalline silicon and/or any othersuitable material.

Each of the stacked decks is diagrammatically illustrated to comprisememory cells; with DECK-A having the illustrated memory cells MC-A1 andMC-A2, DECK-B having the illustrated memory cells MC-B1 and MC-B2, andDECK-C having the illustrated memory cells MC-C1 and MC-C2. Althougheach deck is shown comprising only a pair of memory cells in order tosimplify the drawing, in practice the decks may comprise memory arrayshaving large quantities of memory cells; such as, for example, hundredsof memory cells, thousands of memory cells, millions of memory cells,billions of memory cells, etc. Approximate boundaries of the illustratedmemory cells are diagrammatically illustrated with dashed-lines.

The memory cells utilized in DECKs A-C may include any suitable memorycells, such as, for example, 1T-1C memory cells, 2T-1C memory cells,2T-2C memory cells, 3T-1C memory cells, etc. The memory cells utilizedin DECK-A (MC-A1 and MC-A2) may include the same type of memory cells asare utilized in one or both of DECKs B and C, or may differ from thetype of memory cells utilized in at least one of DECKs B and C.

Wordlines extend across the memory array decks; with the wordlinesacross DECK-A being labeled WL-A1, WL-A2 and WL-A3, the wordlines acrossDECK-B being labeled WL-B1, WL-B2 and WL-B3, and the wordlines acrossDECK-C being labeled WL-C1, WL-C2 and WL-C3. Although only threewordlines are shown extending across each memory array deck in order tosimplify the illustration; there may be many more wordlines in practice,as will be clear to persons of ordinary skill in the art. In someembodiments, the wordlines across DECK-A may be considered to be a firstseries of wordlines, the wordlines across DECK-B may be considered to bea second series of wordlines, and the wordlines across DECK-C may beconsidered to be a third series of wordlines.

Bitlines extend across the memory array decks; with the bitlines beingprovided as paired comparative bitlines. Specifically, a “T” bitline ispaired with a “C” bitline in configurations that may be analogous tothose described with reference to the prior art memory cells and arraysdescribed above in the BACKGROUND, and in operation an electrical valueof the “T” bitline is compared to an electrical value of the “C” bitlineutilizing a sense amplifier.

The bitlines across DECK-A include paired comparative bitlines BL-T-A1and BL-C-A1, and BL-T-A2 and BL-C-A2. The bitlines across DECK-B includepaired comparative bitlines BL-T-B1 and BL-C-B1, and BL-T-B2 andBL-C-B2. The bitlines across DECK-C include paired comparative bitlinesBL-T-C1 and BL-C-C1, and BL-T-C2 and BL-C-C2. Although only two sets ofpaired comparative bitlines are shown extending across each memory arraydeck in order to simplify the illustration; there may be many more setsof paired comparative bitlines in practice, as will be clear to personsof ordinary skill in the art. In some embodiments, the bitlines acrossDECK-A may be considered to be a first series of bitlines, the bitlinesacross DECK-B may be considered to be a second series of bitlines, andthe bitlines across DECK-C may be considered to be a third series ofbitlines.

The wordlines and bitlines are conductive lines, and in some embodimentsthe term “conductive line” may be used to generically refer to wordlinesand/or bitlines.

The wordlines WL-A1, WL-A2 and WL-A3 pass through wordline isolationcircuitry (labeled as WL-ISO-A) and then join with conductive paths(labeled as HWL-1, HWL-2 and HWL-3) which extend to wordline driversWL-D1, WL-D2 and WL-D3. The wordlines WL-B1, WL-B2 and WL-B3 passthrough wordline isolation circuitry (labeled as WL-ISO-B) and then joinwith the conductive paths HWL-1, HWL-2 and HWL-3. The wordlines WL-C1,WL-C2 and WL-C3 pass through wordline isolation circuitry (labeled asWL-ISO-C) and then join with the conductive paths HWL-1, HWL-2 andHWL-3.

The conductive paths HWL-1, HWL-2 and HWL-3 are labeled as “HWL” pathsto indicate that they may be considered as “hierarchical wordline”paths. The conductive paths HWL-1, HWL-2 and HWL-3 may be referred to asfirst, second and third conductive wordline paths, respectively.

The wordline drivers WL-D1, WL-D2 and WL-D3 may be in any suitablelocation relative to the stacked memory array decks (i.e., DECK-A,DECK-B and DECK-C); and in some embodiments may be below the stackedmemory array decks, above the stacked memory array decks, or laterallyadjacent the stacked memory array decks. The wordline drivers WL-D1,WL-D2 and WL-D3 may be referred to as first, second and third wordlinedrivers, respectively. In some embodiments, the wordline drivers WL-D1,WL-D2 and WL-D3 may be considered to be components which areelectrically coupled with conductive lines (wordlines) utilizing theconductive paths HWL-1, HWL-2 and HWL-3.

The wordline isolation circuitry WL-ISO-A comprises transistors 20, andis configured to enable the wordlines of DECK A to be electricallyisolated from the conductive paths HWL-1, HWL-2 and HWL-3 when anotherdeck (i.e., DECK-B or DECK-C) is being accessed for operation (e.g.,reading, writing, etc.); while enabling the wordlines of DECK-A to beelectrically coupled with the conductive paths HWL-1, HWL-2 and HWL-3when DECK-A is being accessed for operation. Similarly, the wordlineisolation circuitries WL-ISO-B and WL-ISO-B comprise transistors 20 andare configured to enable the wordlines of DECKs B and C, respectively,to be electrically isolated from the conductive paths HWL-1, HWL-2 andHWL-3 when another deck is being accessed for operation; while enablingthe wordlines of either DECK-B or DECK-C to be electrically coupled withthe conductive paths HWL-1, HWL-2 and HWL-3 when such deck is beingaccessed for operation.

The electrical coupling of a deck (e.g., DECK-A, DECK-B or DECK-C) tothe conductive paths HWL-1, HWL-2 and HWL-3 enables electrical couplingof the wordlines of the deck to the associated wordline drivers WL-D1,WL-D2 and W1-D3; and the electrical isolation of the deck (e.g., DECK-A,DECK-B or DECK-C) from the conductive paths HWL-1, HWL-2 and HWL-3enables electrical isolation of the wordlines of the deck from theassociated wordline drivers.

The wordline isolation circuitries WL-ISO-A, WL-ISO-B and WL-ISO-C arecoupled with drivers WL-ISO-A DRIVER, WL-ISO-B DRIVER and WL-ISO-CDRIVER, respectively. The wordline isolation circuitries WL-ISO-A,WL-ISO-B and WL-ISO-C are described in more detail below with referenceto FIG. 10.

In some embodiments, it may acceptable for the wordlines of a deck tofloat (i.e., to have no specifically set voltage) when the deck isisolated from the wordline drivers. In other applications, it may bedesired to hold the wordlines of the deck at a preset voltage (e.g.,ground voltage, common plate voltage, etc.) when the deck is isolatedfrom the wordline drivers. Accordingly, the embodiment of FIG. 7 showsoptional structures which may be utilized to hold the wordlines at apreset voltage. Specifically, the wordlines from decks A, B and C(WL-A1, WL-A2, WL-A3, WL-B1, WL-B2, WL-B3, WL-C1, WL-C2 and WL-C3) passthrough wordline isolation circuitries (labeled as WL-ISO-A-1,WL-ISO-B-1 and WL-ISO-C-1) to a conductive plate, PLATE-1. The PLATE-1may be held at any desired voltage (e.g., ground voltage, common platevoltage, etc.), and may be referred to as a controlled-voltage plate.

The wordline isolation circuitries WL-ISO-A-1, WL-ISO-B-1 and WL-ISO-C-1may be referred to as second wordline isolation circuitries todistinguish them from the first wordline isolation circuitries WL-ISO-A,WL-ISO-B and WL-ISO-C described above.

In the shown embodiment, PLATE-1 and the second wordline isolationcircuitries (WL-ISO-A-1, WL-ISO-B-1 and WL-ISO-C-1) are proximate thestacked memory array decks (DECK-A, DECK-B, DECK-C) and laterally offsetfrom the stacked memory array decks. The first wordline isolationcircuitries (WL-ISO-A, WL-ISO-B and WL-ISO-C) and associated conductivepaths (HWL-1, HWL-2 and HWL-3) are also proximate the stacked memoryarray decks (DECK-A, DECK-B, DECK-C) and laterally offset from thestacked memory array decks; and are along an opposing side of thestacked memory array decks from PLATE-1 and the second wordlineisolation circuitries (WL-ISO-A-1, WL-ISO-B-1 and WL-ISO-C-1).

The wordline isolation circuitries WL-ISO-A-1, WL-ISO-B-1 and WL-ISO-C-1are coupled with drivers WL-ISO-A-1 DRIVER, WL-ISO-B-1 DRIVER andWL-ISO-C-1 DRIVER, respectively.

The wordline isolation circuitries WL-ISO-A-1, WL-ISO-B-1 and WL-ISO-C-1comprise transistors 20, and are configured to enable the wordlines ofone of the stacked decks (DECK-A, DECK-B, DECK-C) to be electricallyisolated from PLATE-1 when the deck is being accessed for operation;while enabling the wordlines of the other decks to be electricallycoupled with PLATE-1 and held at a preset voltage. The wordlineisolation circuitries WL-ISO-A-1, WL-ISO-B-1 and WL-ISO-C-1 aredescribed in more detail below with reference to FIG. 13.

In the description above, the wordline isolation circuitries WL-ISO-A,WL-ISO-B and WL-ISO-C are referred to as first wordline isolationcircuitries, and the wordline isolation circuitries WL-ISO-A-1,WL-ISO-B-1 and WL-ISO-C-1 are referred to as second wordline isolationcircuitries. In alternative descriptions, the wordline isolationcircuitries WL-ISO-A, WL-ISO-B and WL-ISO-C may be referred to as first,second and third wordline isolation circuitries, respectively; and thewordline isolation circuitries WL-ISO-A-1, WL-ISO-B-1 and WL-ISO-C-1 maybe referred to as fourth, fifth and sixth wordline isolationcircuitries, respectively.

The electrical flow along the bitlines of the various stacked memoryarray decks (i.e., DECK-A, DECK-B and DECK-C) may also be controlledwith isolation circuitry. In the embodiment of FIG. 7, the bitlinesBL-T-A1, BL-C-A1, BL-T-A2 and BL-C-A2 pass through bitline isolationcircuitry (labeled as BL-ISO-A) and then join with conductive paths(labeled as HBL-T1, HBL-C1, HBL-T2 and HBL-C2) which extend to senseamplifiers SA1 and SA2. The bitlines BL-T-B1, BL-C-B1, BL-T-B2 andBL-C-B2 pass through bitline isolation circuitry (labeled as BL-ISO-B)and then join with the conductive paths HBL-T1, HBL-C1, HBL-T2 andHBL-C2. The bitlines BL-T-C1, BL-C-C1, BL-T-C2 and BL-C-C2 pass throughbitline isolation circuitry (labeled as BL-ISO-C) and then join with theconductive paths HBL-T1, HBL-C1, HBL-T2 and HBL-C2. In some embodiments,the sense amplifiers SA1 and SA2 may be referred to as first and secondsense amplifiers, respectively.

In some embodiments, the sense amplifiers SA1 and SA2 may be consideredto be components which are electrically coupled to the conductive lines(bitlines) utilizing the conductive bitline paths HBL-T1, HBL-C1, HBL-T2and HBL-C2.

The conductive paths HBL-T1, HBL-C1, HBL-T2 and HBL-C2 are labeled as“HBL” paths to indicate that they may be considered as “hierarchicalbitline” paths. In some embodiments, the conductive paths HBL-T1 andHBL-C1 may be referred to as a first HBL-T path and a first HBL-C path,respectively; and the conductive paths HBL-T2 and HBL-C2 may be referredto as a second HBL-T path and a second HBL-C path, respectively.

The sense amplifiers SA1 and SA2 may be in any suitable locationrelative to the stacked memory array decks (i.e., DECK-A, DECK-B andDECK-C); and in some embodiments may be below the stacked decks, abovethe stacked decks, or laterally adjacent the stacked decks.

The bitline isolation circuitry BL-ISO-A comprises transistors 20, andis configured to enable the bitlines of DECK-A to be electricallyisolated from the conductive paths HBL-T1, HBL-C1, HBL-T2 and HBL-C2when another deck (i.e., DECK-B or DECK-C) is being accessed foroperation (e.g., reading, writing, etc.); while enabling the bitlines ofDECK-A to be electrically coupled with the conductive paths HBL-T1,HBL-C1, HBL-T2 and HBL-C2 when DECK-A is being accessed for operation.Similarly, the bitline isolation circuitries BL-ISO-B and BL-ISO-Ccomprise transistors 20, and are configured to enable the bitlines ofDECKs B and C, respectively, to be electrically isolated from theconductive paths HBL-T1, HBL-C1, HBL-T2 and HBL-C2 when another deck isbeing accessed for operation; while enabling the bitlines of eitherDECK-B or DECK-C to be electrically coupled with the conductive pathsHBL-T1, HBL-C1, HBL-T2 and HBL-C2 when such deck is being accessed foroperation.

The electrical coupling of a deck (e.g., DECK-A, DECK-B or DECK-C) tothe conductive paths HBL-T1, HBL-C1, HBL-T2 and HBL-C2 enableselectrical coupling of the comparative bitlines of the deck to theassociated sense amplifiers SA1 and SA2; and the electrical isolation ofthe deck (e.g., DECK-A, DECK-B or DECK-C) from the conductive pathsHBL-T1, HBL-C1, HBL-T2 and HBL-C2 enables electrical isolation of thecomparative bitlines of the deck from the associated sense amplifiers.

The bitline isolation circuitries BL-ISO-A, BL-ISO-B and BL-ISO-C arecoupled with drivers BL-ISO-A DRIVER, BL-ISO-B DRIVER and BL-ISO-CDRIVER, respectively. The bitline isolation circuitries (specifically,BL-ISO-A and BL-ISO-B) are described in more detail below with referenceto FIG. 9.

In some embodiments, it may be acceptable for the bitlines of a deck tofloat (i.e., to have no specifically set voltage) when the deck isisolated from the sense amplifiers. In other applications, it may bedesired to hold the bitlines of the deck at a preset voltage (e.g.,ground voltage, common plate voltage, etc.) when the deck is isolatedfrom the sense amplifiers. Accordingly, the embodiment of FIG. 7 showsoptional structures which may be utilized to hold the bitlines at apreset voltage. Specifically, the bitlines from decks A, B and C(BL-T-A1, BL-C-A1, BL-T-A2, BL-C-A2, BL-T-B1, BL-C-B1, BL-T-B2, BL-C-B2,BL-T-C1, BL-C-C1, BL-T-C2 and BL-C-C2) pass through bitline isolationcircuitries (labeled as BL-ISO-A-1, BL-ISO-B-1 and BL-ISO-C-1) to aconductive plate, PLATE-2. The PLATE-2 may be held at any desiredvoltage (e.g., ground voltage, common plate voltage, etc.), and may bereferred to as a controlled-voltage plate. PLATE-2 may be held at thesame voltage as PLATE-1, and in some embodiments PLATE-1 and PLATE-2 maybe a single structure rather than being two separate structures.

The bitline isolation circuitries BL-ISO-A-1, BL-ISO-B-1 and BL-ISO-C-1may be referred to as second bitline isolation circuitries todistinguish them from the first bitline isolation circuitries BL-ISO-A,BL-ISO-B and BL-ISO-C described above.

In the shown embodiment, PLATE-2 and the second bitline isolationcircuitries (BL-ISO-A-1, BL-ISO-B-1 and BL-ISO-C-1) are proximate thestacked memory array decks (DECK-A, DECK-B, DECK-C) and laterally offsetfrom the stacked memory array decks. The first bitline isolationcircuitries (BL-ISO-A, BL-ISO-B and BL-ISO-C) and associated conductivepaths (HBL-T1, HBL-C1, HBL-T2 and HBL-C2) are also proximate the stackedmemory array decks (DECK-A, DECK-B, DECK-C) and laterally offset fromthe stacked memory array decks; and are along an opposing side of thestack memory array decks from PLATE-2 and the second bitline isolationcircuitries (WL-ISO-A-1, WL-ISO-B-1 and WL-ISO-C-1).

The second bitline isolation circuitries BL-ISO-A-1, BL-ISO-B-1 andBL-ISO-C-1 are coupled with drivers BL-ISO-A-1 DRIVER, BL-ISO-B-1 DRIVERand WB-ISO-C-1 DRIVER, respectively.

The bitline isolation circuitries BL-ISO-A-1, BL-ISO-B-1 and BL-ISO-C-1comprise transistors 20, and are configured to enable the bitlines ofone of the stacked decks (DECK-A, DECK-B, DECK-C) to be electricallyisolated from PLATE-2 when the deck is being accessed for operation;while enabling the bitlines of the other decks to be electricallycoupled with PLATE-2 and held at a preset voltage. The bitline isolationcircuitries (specifically, BL-ISO-A-1 and BL-ISO-B-1) are described inmore detail below with reference to FIG. 12.

In the description above, the bitline isolation circuitries BL-ISO-A,BL-ISO-B and BL-ISO-C are referred to as first bitline isolationcircuitries, and the bitline isolation circuitries BL-ISO-A-1,BL-ISO-B-1 and BL-ISO-C-1 are referred to as second bitline isolationcircuitries. In some embodiments, the bitline isolation circuitriesBL-ISO-A, BL-ISO-B and BL-ISO-C may be referred to as first, second andthird bitline isolation circuitries, respectively, and the bitlineisolation circuitries BL-ISO-A-1, BL-ISO-B-1 and BL-ISO-C-1 may bereferred to as fourth, fifth and sixth bitline isolation circuitries,respectively.

The various bitline isolation circuitries (BL-ISO-A, BL-ISO-B, BL-ISO-C,BL-ISO-A-1, BL-ISO-B-1 and BL-ISO-C-1) and wordline isolationcircuitries (WL-ISO-A, WL-ISO-B, WL-ISO-C, WL-ISO-A-1, WL-ISO-B-1 andWL-ISO-C-1) described with reference to FIG. 7 may be genericallyreferred to as isolation circuitries in the discussion and claims thatfollow. It may be advantageous to utilize both bitline isolationcircuitries and wordline isolation circuitries in conjunction withstacked memory array decks (as shown in FIG. 7). However, it is to beunderstood that there may also be stacked-memory-array-deck applicationsin which bitline isolation circuitries are utilized without accompanyingwordline isolation circuitries, or in which wordline isolationcircuitries are utilized without accompanying bitline isolationcircuitries; and such applications, although not specifically shown, areencompassed by various embodiments described herein.

FIG. 8 shows portions of the integrated memory assembly 10 of FIG. 7,and specifically illustrates example memory cells MC-A1, MC-A2, MC-B1and MC-B2 of DECKs A and B. The example memory cells are 2T-1C memorycells, with each memory cell comprising a pair of transistors (T1 andT2), and a capacitor (C) having one electrode coupled with thetransistor T1 and another electrode coupled with the transistor T2. Inthe illustrated embodiment, the wordlines WL-A1 and WL-B1 are lines ofconductive material 22 extending along a horizontal direction, and thetransistors (T1 and T2) comprise semiconductor material 24 which extendsthrough the conductive material 22. The transistors also comprise a gatedielectric material 26 which is provided between the conductive material22 of the wordlines (WL-A1 and WL-B1) and the semiconductor material 24.Although it appears that the wordlines WL-A1 and WL-B1 are broken by thedielectric material 26 and semiconductor material 24 of transistors T1and T2 in the cross-sectional view of FIG. 8, in practice the conductivematerial 22 of the wordlines may extend around the materials 24 and 26in regions outside of the illustrated plane of FIG. 8.

The semiconductor material 24 may comprise any suitable material; and insome embodiments may comprise appropriately-doped silicon.

The gate dielectric material 26 may comprise any suitable material, andin some embodiments may comprise silicon dioxide. In some embodiments,the gate dielectric material 26 may be referred to simply as dielectricmaterial.

The bitlines (BL-T-A1, BL-C-A1, BL-T-A2, BL-C-A2, BL-T-B1, BL-C-B1,BL-T-B2 and BL-C-B2) are illustrated to be lines of conductive material28 extending into and out of the page relative to the cross-sectionalview of FIG. 8. The conductive material 28 of the bitlines may becompositionally the same as the conductive material 22 of the wordlinesin some embodiments, and in other embodiments may be compositionallydifferent than the conductive material 22.

The wordlines WL-A1 and WL-B1 extend to the conductive path HWL-1through the isolation circuitries WL-ISO-A and WL-ISO-B, respectively.The bitlines BL-T-A1, BL-C-A1, BL-T-A2 and BL-C-A2 extend to theconductive paths HBL-T1, HBL-C1, HBL-T2 and HBL-C2 through the isolationcircuitry BL-ISO-A; and the bitlines BL-T-B1, BL-C-B1, BL-T-B2 andBL-C-B2 extend to the conductive paths HBL-T1, HBL-C1, HBL-T2 and HBL-C2through the isolation circuitry BL-ISO-B.

Although 2T-1C memory cells are shown in FIG. 8, it is to be understoodthat other memory cells may be utilized instead of the 2T-1C memorycells. Such other memory cells may be, for example, 1T-1C memory cells,2T-2C memory cells, 3T-1C memory cells, etc.

FIG. 9 schematically illustrates regions of the bitline isolationcircuitries BL-ISO-A and BL-ISO-B of FIGS. 7 and 8. The BL-ISO-Acircuitry includes a conductive line 30 that extends from the BL-ISO-ADRIVER, and which is electrically coupled with the gates of a firstseries of the transistors 20; and the BL-ISO-B circuitry includes aconductive line 32 that extends from the BL-ISO-B DRIVER, and which iselectrically coupled with the gates of a second series of thetransistors 20.

In some embodiments, the illustrated transistors 20 of the BL-ISO-Acircuitry may be referred to as a first transistor 20 a, a secondtransistor 20 b, a third transistor 20 c and a fourth transistor 20 d;and the illustrated transistors 20 of the BL-ISO-B circuitry may bereferred to as a fifth transistor 20 e, a sixth transistor 20 f, aseventh transistor 20 g and an eighth transistor 20 h.

The bitlines BL-T-A1, BL-C-A1, BL-T-A2 and BL-C-A2 may be considered toextend through the first isolation circuitry BL-ISO-A to the bitlinepaths HBL-T1, HBL-C1 HBL-T2 and HBL-C2. The first transistor 20 agatedly connects BL-T-A1 with a first conductive route 33 to the HBL-T1path (i.e., the first BL-T conductive path); the second transistor 20 bgatedly connects BL-C-A1 with a second conductive route 34 to the HBL-C1path (i.e., the first BL-C conductive path); the third transistor 20 cgatedly connects BL-T-A2 with a third conductive route 35 to the HBL-T2path (i.e., the second BL-T conductive path); and the fourth transistor20 d gatedly connects BL-C-A2 with a fourth conductive route 36 to theHBL-C2 path (i.e., the second BL-C conductive path).

The bitlines BL-T-B1, BL-C-B1, BL-T-B2 and BL-C-B2 may be considered toextend through the second isolation circuitry BL-ISO-B to the bitlinepaths HBL-T1, HBL-C1 HBL-T2 and HBL-C2. The fifth transistor 20 egatedly connects BL-T-B1 with a fifth conductive route 37 to the HBL-T1path; the sixth transistor 20 f gatedly connects BL-C-B1 with a sixthconductive route 38 to the HBL-C1 path; the seventh transistor 20 ggatedly connects BL-T-B2 with a seventh conductive route 39 to theHBL-T2 path; and the eighth transistor 20 h gatedly connects BL-C-B2with an eighth conductive route 40 to the HBL-C2 path.

FIG. 10 schematically illustrates regions of the wordline isolationcircuitries WL-ISO-A, WL-ISO-B and WL-ISO-C of FIGS. 7 and 8. TheWL-ISO-A circuitry includes a conductive line 42 that extends from theWL-ISO-A DRIVER and which is electrically coupled with the gates of afirst series of the transistors 20; the WL-ISO-B circuitry includes aconductive line 43 that extends from the WL-ISO-B DRIVER and which iselectrically coupled with the gates of a second series of thetransistors 20; and the WL-ISO-C circuitry includes a conductive line 44that extends from the WL-ISO-C DRIVER and which is electrically coupledwith the gates of a third series of the transistors 20.

In some embodiments, the illustrated transistors 20 of the WL-ISO-Acircuitry may be referred to as a first transistor 20 a, a secondtransistor 20 b and a third transistor 20 c; the illustrated transistors20 of the WL-ISO-B circuitry may be referred to as a fourth transistor20 d, a fifth transistor 20 e, and a sixth transistor 20 f; and theillustrated transistors 20 of the WL-ISO-C circuitry may be referred toas a seventh transistor 20 g, an eighth transistor 20 h, and a ninthtransistor 20 i.

The wordlines WL-A1, WL-A2 and WL-A3 may be considered to extend throughthe first isolation circuitry WL-ISO-A to the wordline paths HWL-1,HWL-2 and HWL-3. The first transistor 20 a gatedly connects WL-A1 with afirst conductive route 45 to the HWL-1 path (i.e., the firsthierarchical wordline conductive path); the second transistor 20 bgatedly connects WL-A2 with a second conductive route 46 to the HWL-2path (i.e., the second hierarchical wordline conductive path); and thethird transistor 20 c gatedly connects WL-A3 with a third conductiveroute 47 to the HWL-3 path (i.e., the third hierarchical wordlineconductive path).

The wordlines WL-B1, WL-B2 and WL-B3 may be considered to extend throughthe second isolation circuitry WL-ISO-B to the wordline paths HWL-1,HWL-2 and HWL-3. The fourth transistor 20 d gatedly connects WL-B1 witha fourth conductive route 48 to the HWL-1 path; the fifth transistor 20e gatedly connects WL-B2 with a fifth conductive route 49 to the HWL-2path; and the sixth transistor 20 f gatedly connects WL-B3 with a sixthconductive route 50 to the HWL-3 path.

The wordlines WL-C1, WL-C2 and WL-C3 may be considered to extend throughthe third isolation circuitry WL-ISO-C to the wordline paths HWL-1,HWL-2 and HWL-3. The seventh transistor 20 g gatedly connects WL-C1 witha seventh conductive route 51 to the HWL-1 path; the eighth transistor20 h gatedly connects WL-C2 with an eighth conductive route 52 to theHWL-2 path; and the ninth transistor 20 i gatedly connects WL-C3 with aninth conductive route 53 to the HWL-3 path.

In some embodiments, the numbering of the transistors 20 a-h of FIG. 9and/or of transistors 20 a-i of FIG. 10 may be altered in a particularclaim relative to the descriptions in FIGS. 9 and 10, depending on howmany total transistors are described in a particular claim set. Forinstance, if only the transistors 20 a, 20 b, 20 d and 20 e of FIG. 10are described in a claim set, then such may be referred to as the first,second, third and fourth transistors, respectively. As another example,if the bitline isolation transistors of FIG. 9 are described in a claimset together with some or all of the wordline isolation transistors ofFIG. 10; then the bitline isolation transistors of FIG. 9 may bereferred to as the first through eighth transistors and the wordlineisolation transistors of FIG. 10 may be referred to as ninth and highertransistors. As another example, if the bitline isolation transistors ofFIG. 9 are described in a claim set together with some or all of thewordline transistors of FIG. 10; then the wordline isolation transistorsof FIG. 10 may be referred to as the first through sixth transistors (orfirst through fourth transistors if only some are described in theclaim) and the bitline isolation transistors of FIG. 9 may be referredto as the consecutively higher-numbered transistors.

FIG. 11 shows portions of the integrated memory assembly 10 of FIG. 7.FIG. 11 specifically shows the wordlines WL-A1 and WL-B1 extending tothe controlled-voltage plate, PLATE-1, through the wordline isolationcircuitries WL-ISO-A-1 and WL-ISO-B-1, respectively; and shows thebitlines BL-T-A1, BL-C-A1, BL-T-A2, BL-C-A2, BL-T-B1, BL-C-B1, BL-T-B2and BL-C-B2 extending to the controlled-voltage plate, PLATE-2, throughthe bitline isolation circuitries BL-ISO-A-1 and BL-ISO-B-1.

FIG. 12 schematically illustrates regions of the bitline isolationcircuitries BL-ISO-A-1 and BL-ISO-B-1 of FIGS. 7 and 11. The BL-ISO-A-1circuitry includes a conductive line 56 that extends from the BL-ISO-A-1DRIVER and which is electrically coupled with the gates of a firstseries of the transistors 20; and the BL-ISO-B-1 circuitry includes aconductive line 58 that extends from the BL-ISO-B-1 DRIVER and which iselectrically coupled with the gates of a second series of thetransistors 20.

In some embodiments, the illustrated transistors 20 of the BL-ISO-A-1circuitry may be referred to as a first transistor 20 a, a secondtransistor 20 b, a third transistor 20 c and a fourth transistor 20 d;and the illustrated transistors 20 of the BL-ISO-B-1 circuitry may bereferred to as a fifth transistor 20 e, a sixth transistor 20 f, aseventh transistor 20 g and an eighth transistor 20 h.

The bitlines BL-T-A1, BL-C-A1, BL-T-A2 and BL-C-A2 may be considered toextend through the isolation circuitry BL-ISO-A-1 to PLATE-2. The firsttransistor 20 a gatedly connects BL-T-A1 with a first conductive route59 to PLATE-2; the second transistor 20 b gatedly connects BL-C-A1 witha second conductive route 60 to PLATE-2; the third transistor 20 cgatedly connects BL-T-A2 with a third conductive route 61 to PLATE-2;and the fourth transistor 20 d gatedly connects BL-C-A2 with a fourthconductive route 62 to PLATE-2.

The bitlines BL-T-B1, BL-C-B1, BL-T-B2 and BL-C-B2 may be considered toextend through the isolation circuitry BL-ISO-B-1 to PLATE-2. The fifthtransistor 20 e gatedly connects BL-T-B1 with a fifth conductive route63 to PLATE-2; the sixth transistor 20 f gatedly connects BL-C-B1 with asixth conductive route 64 to PLATE-2; the seventh transistor 20 ggatedly connects BL-T-B2 with a seventh conductive route 65 to PLATE-2;and the eighth transistor 20 h gatedly connects BL-C-B2 with an eighthconductive route 66 to PLATE-2.

In some embodiments, the bitline isolation circuitries BL-ISO-A-1 andBL-ISO-B-1 may be referred to as third and fourth isolation circuitriesto distinguish them from the first and second bitline isolationcircuitries BL-ISO-A and BL-ISO-B. In such embodiments, the transistors20 a-h of FIG. 12 may be referred to as ninth, tenth, eleventh, twelfth,thirteenth, fourteenth, fifteenth, and sixteenth transistors,respectively, to distinguish them from the first eight transistors ofthe BL-ISO-A and BL-ISO-B circuitries (shown in FIG. 9); and theconductive routes 59-66 may be referred to as ninth through sixteenthconductive routes.

FIG. 13 schematically illustrates regions of the wordline isolationcircuitries WL-ISO-A-1, WL-ISO-B-1 and WL-ISO-C-1 of FIGS. 7 and 11. TheWL-ISO-A-1 circuitry includes a conductive line 67 that extends from theWL-ISO-A-1 DRIVER and which is electrically coupled with the gates of afirst series of the transistors 20; the WL-ISO-B-1 circuitry includes aconductive line 68 that extends from the WL-ISO-B-1 DRIVER and which iselectrically coupled with the gates of a second series of thetransistors 20; and the WL-ISO-C-1 circuitry includes a conductive line69 that extends from the WL-ISO-C-1 DRIVER and which is electricallycoupled with the gates of a third series of the transistors 20.

In some embodiments, the illustrated transistors 20 of the WL-ISO-A-1,WL-ISO-B-1 and WL-ISO-C-1 circuitries may be referred to as first-ninthtransistors 20 a-i, respectively. The wordlines WL-A1, WL-A2 and WL-A3may be considered to extend through the first isolation circuitryWL-ISO-A-1 to PLATE-1; the wordlines WL-B1, WL-B2 and WL-B3 may beconsidered to extend through the second isolation circuitry WL-ISO-B-1to PLATE-1; and the wordlines WL-C1, WL-C2 and WL-C3 may be consideredto extend through the third isolation circuitry WL-ISO-C-1 to PLATE-1.

The first transistor 20 a gatedly connects WL-A1 with a first conductiveroute 70 to PLATE-1; the second transistor 20 b gatedly connects WL-A2with a second conductive route 71 to PLATE-1; and the third transistor20 c gatedly connects WL-A3 with a third conductive route 72 to PLATE-1.The fourth transistor 20 d gatedly connects WL-B1 with a fourthconductive route 73 to PLATE-1; the fifth transistor 20 e gatedlyconnects WL-B2 with a fifth conductive route 74 to PLATE-1; and thesixth transistor 20 f gatedly connects WL-B3 with a sixth conductiveroute 75 to PLATE-1. The seventh transistor 20 g gatedly connects WL-C1with a seventh conductive route 76 to PLATE-1; the eighth transistor 20h gatedly connects WL-C2 with an eighth conductive route 77 to PLATE-1;and the ninth transistor 20 i gatedly connects WL-C3 with a ninthconductive route 78 to PLATE-1.

In some embodiments, the wordline isolation circuitries WL-ISO-A-1,WL-ISO-B-1 and WL-ISO-C-1 may be referred to as fourth through sixthisolation circuitries to distinguish them from the first through thirdwordline isolation circuitries WL-ISO-A, WL-ISO-B and WL-ISO-C (FIG.10). In such embodiments, the transistors 20 a-i of FIG. 13 may bereferred to as tenth through eighteenth transistors, respectively, todistinguish them from the first nine transistors of the WL-ISO-A,WL-ISO-B and WL-ISO-C circuitries (shown in FIG. 10); and the conductiveroutes 70-78 may be referred to as tenth through eighteenth conductiveroutes, respectively, to distinguish them from the first nine conductiveroutes of the WL-ISO-A, WL-ISO-B and WL-ISO-C circuitries (shown in FIG.10).

In some embodiments, only some of the transistors of FIGS. 10 and 13 arereferred to in a particular claim or description, and accordingly thenumbering of the transistors may vary relative to the descriptions inFIGS. 10 and 13. For instance, if four transistors are described in aclaim set as being associated with the wordline isolation circuitriesWL-ISO-A and WL-ISO-B (shown in FIG. 10), and if four more transistorsare described in the claim set as being associated with the wordlineisolation circuitries WL-ISO-A-1 and WL-ISO-B-1 (shown in FIG. 13); thenthe four transistors associated with wordline isolation circuitriesWL-ISO-A and WL-ISO-B may be referred to as the first through fourthtransistors, and the four transistors associated with wordline isolationcircuitries WL-ISO-A-1 and WL-ISO-B-1 may be referred to as the fifththrough eighth transistors. Also, the four conductive routes associatedwith wordline isolation circuitries WL-ISO-A and WL-ISO-B may bereferred to as the first through fourth conductive routes, and the fourconductive routes associated with wordline isolation circuitriesWL-ISO-A-1 and WL-ISO-B-1 may be referred to as the fifth through eighthconductive routes.

FIG. 7 is a diagrammatic view of an example integrated memory assembly10 having a generic stack of memory array decks (DECKs A-C). FIG. 14shows another example integrated memory assembly 10 a, with such memoryarray having memory array decks (DECKs A and B) which specificallycomprise 2T-1C memory cells. Each memory cell comprises a firsttransistor T1, a second transistor T2 and a capacitor C. Two memorycells of DECK A are specifically identified as memory cells MC-A1 andMC-A2, and two memory cells of DECK B are specifically identified asmemory cells MC-B1 and MC-B2. The controlled-voltage plates (PLATE-1 andPLATE-2) of FIG. 7 are not shown in FIG. 14, but such plates (togetherwith appropriate isolation circuitry analogous to the circuitriesWL-ISO-A-1, BL-ISO-A-1, etc. described with reference to FIG. 7) may beincluded in some embodiments.

The various components and structures of FIG. 14 are labeled withanalogous numbering and symbols as are utilized above in describingFIGS. 7-13. The illustration of FIG. 14 illustrates the relationships ofthe bitlines (BL-T-A1, BL-C-A1, BL-T-A2, BL-C-A2, BL-T-B1, BL-C-B1,BL-T-B2 and BL-C-B2) and wordlines (WL-A1, WL-A2, WL-A3, WL-B1, WL-B2and WL-B3) to the 2T-1C memory cells (e.g. memory cells MC-A1, MC-A2,MC-B1 and MC-B2). FIG. 14 also shows the conductive lines 30 and 32extending from the bitline isolation drivers (BL-ISO-A DRIVER andBL-ISO-B DRIVER), as well as the conductive lines 42 and 43 extendingfrom the wordline isolation drivers (WL-ISO-A DRIVER and WL-ISO-BDRIVER). The conductive lines 30, 32, 42 and 43 electrically couple withgates of transistors 20 as described above with reference to FIGS. 9 and10. FIG. 14 shows conductive routes 33-40 (described above withreference to FIG. 9) extending from the transistors 20 to thehierarchical bitline paths (HBL-T1, HBL-C1, HBL-T2 and HBL-C2), and alsoshows conductive routes 45-50 (discussed above with reference to FIG.10) from the transistors 20 to the hierarchical wordline paths (HWL-1,HWL-2, and HWL-3). A couple regions of the hierarchical bitline pathsHBL-T1 and HBL-C1 are shown in dashed line to indicate that such regionspass across a pair of the illustrated transistors 20, but do not passthrough the illustrated transistors.

FIG. 15 shows a region of another example integrated memory assembly 10b. Such region includes a portion of a memory array deck (DECK-A) havingmemory cells (MC-A1 and MC-A2). Other memory array decks (e.g., one orboth of DECKs B and C of FIG. 7) are present with DECK-A in a stackedassembly of memory array decks, but the other memory array decks are notshown in FIG. 15 in order to simplify the drawing.

The memory cells MC-A1 and MC-A2 are 2T-1C memory cells, and comprisethe first and second transistors T1 and T2 together with the capacitorsC.

The first and second transistors T1 and T2 comprise semiconductormaterial 24 extending through conductive material 22 of a wordlineWL-A1, similar to the transistor constructions described above withreference to FIG. 8. Dielectric material 26 is between the semiconductormaterial 24 of the transistors T1 and T2, and the conductive material 22of wordline WL-A1. Although it appears that the wordline WL-A1 is brokenby the materials 24 and 26 of transistors T1 and T2 in thecross-sectional view of FIG. 15, in practice the conductive material 22extends around the materials 24 and 26 in regions outside of theillustrated plane of FIG. 15.

The transistors T1 and T2 comprise gated channel regions 91 withinsemiconductor material 24, and comprise source/drain regions 97 and 99on opposing sides of the channel regions 91. The channel regions 91extend vertically through the conductive material 22 of the wordlineWL-A1.

The capacitors C comprise first conductive material 80 corresponding tofirst capacitor nodes 81, second conductive material 82 corresponding tosecond capacitor nodes 83, and capacitor dielectric 84 between the firstand second conductive materials 80 and 82. The first capacitor nodes 81are electrically coupled with the transistors T1 of the memory cellsMC-A1 and MC-A2; and the second capacitor nodes 83 are electricallycoupled with the transistors T2 of the memory cells.

The first and second conductive materials 80 and 82 may comprise anysuitable composition or combination of compositions; such as, forexample, one or more of various metals (e.g., titanium, tungsten,cobalt, nickel, platinum, etc.), metal-containing compositions (e.g.,metal silicide, metal nitride, metal carbide, etc.), and/orconductively-doped semiconductor materials (e.g., conductively-dopedsilicon, conductively-doped germanium, etc.). The first and secondconductive materials 80 and 82 may be the same composition as oneanother in some embodiments, and may comprise different compositionsrelative to one another in other embodiments.

The capacitor dielectric material 84 may comprise any suitablecomposition or combination of compositions; such as, for example, one ormore of silicon dioxide, silicon nitride, etc.

Insulative material 86 extends over and between the capacitors C, aswell is under the wordline WL-A1. The insulative material 86 maycomprise any suitable composition or combination of compositions,including, for example, one or more of silicon dioxide, silicon nitride,etc.

The DECK-A is shown to be supported by a base 88. The base 88 maycomprise semiconductor material; and may, for example, comprise, consistessentially of, or consist of monocrystalline silicon. The base 88 maybe referred to as a semiconductor substrate. The term “semiconductorsubstrate” means any construction comprising semiconductive material,including, but not limited to, bulk semiconductive materials such as asemiconductive wafer (either alone or in assemblies comprising othermaterials), and semiconductive material layers (either alone or inassemblies comprising other materials). The term “substrate” refers toany supporting structure, including, but not limited to, thesemiconductor substrates described above. In some applications, the base88 may correspond to a semiconductor substrate containing one or morematerials associated with integrated circuit fabrication. Such materialsmay include, for example, one or more of refractory metal materials,barrier materials, diffusion materials, insulator materials, etc.

The base 88 is shown to be spaced from DECK-A by a gap to indicate thatadditional structures or materials may be provided between DECK-A andbase 88. Such additional structures and materials may include, forexample, other memory array decks of a stacked memory assembly.

The wordline WL-A1 is shown extending to the wordline isolationcircuitry WL-ISO-A on one side of the DECK-A (which may be referred toas a first side 87 of the memory array comprised by DECK-A), andextending to the wordline isolation circuitry WL-ISO-A-1 on another sideof the DECK-A (which may be referred to as a second side 89 of thememory array comprised by DECK-A). In the shown embodiment, the firstand second sides 87 and 89 are in opposing relation to one another; withthe memory array of DECK-A extending between the first and second sides87 and 89.

The wordline isolation circuitry WL-ISO-A-1 couples the wordline WL-A1with the controlled-voltage plate (PLATE-1), and the wordline isolationcircuitry WL-ISO-A couples the wordline WL-A1 with the conductive pathHWL-1 extending to the wordline driver WL-D1. In the shown embodiment,the wordline driver WL-D1 is supported by the base 88, and is belowstacked memory array decks (e.g., the shown DECK-A and other decks whichare not shown; and which may include, for example, DECKs B and C of FIG.7). The wordline driver WL-D1 may be directly below the stacked memoryarray decks, or may be laterally offset from being directly below thestacked memory array decks. Although the wordline driver WL-D1 is shownto be below the stacked memory array decks, in other embodiments thewordline driver WL-D1 may be in other locations, such as laterallyoffset from the decks and along the sides of the decks, above the decks,etc. In other embodiments, further, the wordline driver WL-D1 may beformed in the base 88. The wordline driver WL-D1 is an example ofnumerous wordline drivers that may be utilized with stacked memory arraydecks (for instance, the wordline drivers WL-D2 and WL-D3 of FIG. 7 mayalso be utilized), and all of such wordline drivers may be in a similarlocation relative to the stacked memory array decks (e.g., below thestacked memory array decks, beside the stacked memory array decks, overthe stacked memory array decks, etc.).

The controlled-voltage plate (PLATE-1) is shown to be beside the stackedmemory array decks, but in other embodiments may be in other locations;such as, for example, below the stacked memory array decks (e.g.,supported on base 88 beside the wordline drivers), above the stackedmemory array decks, etc.

Bitlines BL-T-A1, BL-C-A1, BL-T-A2 and BL-C-A2 are electrically coupledwith source/drain regions of the transistors T1 and T2. The bitlinesextend to bitline isolation circuitry (BL-ISO-A) which couples thebitlines with the conductive paths HBL-T1, HBL-C1, HBL-T2 and HBL-C2extending to the sense amplifiers SA1 and SA2. In the shown embodiment,the sense amplifiers SA1 and SA2 are supported by the base 88, and arebelow stacked memory array decks (e.g., the shown DECK-A and other deckswhich are not shown, which may include, for example, DECKs B and C ofFIG. 7). The sense amplifiers SA1 and SA2 may be directly below thestacked memory array decks, or may be laterally offset from beingdirectly below the stacked memory array decks. Although the senseamplifiers SA1 and SA2 are shown to be below the stacked memory arraydecks, in other embodiments the sense amplifiers SA1 and SA2 may be inother locations, such as laterally offset from the decks and along thesides of the decks, above the decks, etc. In other embodiments, further,the sense amplifiers SA1 and SA2 may be formed in the base 88. The senseamplifiers SA1 and SA2 are examples of numerous sense amplifiers thatmay be utilized with stacked memory array decks, and all of such senseamplifiers may be in a similar location relative to the stacked memoryarray decks (e.g., below the stacked memory array decks, beside thestacked memory array decks, over the stacked memory array decks, etc.).

Although not shown in FIG. 15, the bitlines BL-T-A1, BL-C-A1, BL-T-A2and BL-C-A2 may also extend to bitline isolation circuitry (BL-ISO-A-1)which couples the bitlines with the controlled-voltage plate (PLATE-2 ofFIG. 7). PLATE-2 may be beside the stacked memory array decks, below thestacked memory array decks (e.g., supported on base 88 beside thewordline drivers), above the stacked memory array decks, etc. In someembodiments, PLATE-1 and PLATE-2 may be both comprised by a singlecontinuous plate, rather than being separate plates.

The various isolation circuitries (e.g., BL-ISO-A, BL-ISO-A-1, WL-ISO-A,WL-ISO-A-1, etc.) may be in any suitable locations relative to thestacked memory array decks; including, for example, laterally beside thestacked memory array decks, above the stacked memory array decks, belowthe stacked memory array decks, etc.

FIG. 16 shows a region of an example integrated memory assembly 10 ccomprising memory cells MC-A1 and MC-A2 of a DECK-A shown in FIG. 15, incombination with analogous memory cells MC-B1 and MC-B2 of a DECK-B. Inthe illustrated assembly, the DECKs A and B are mirrored across acentral plane 85 between them, and share bitlines (illustrated asBL-T-A1/BL-T-B1, BL-C-A1/BL-C-B1, BL-T-A2/BL-T-B2 and BL-C-A2/BL-C-B2).The bitlines are electrically coupled to the bitline isolationcircuitries BL-ISO-A and BL-ISO-B; and may extend through such bitlineisolation circuitries to the conductive paths HBL-T1, HBL-C1, HBL-T2 andHBL-C2 (not shown in FIG. 16). Additional example embodiments utilizingthe configuration of FIG. 16 are described below with reference to FIGS.22 and 23.

Wordline isolation circuitries (e.g., WL-ISO-A and WL-ISO-A-1) are notshown in FIG. 16 in order to simplify the drawing, but may be includedin some applications. Also, the controlled-voltage plates (PLATE-1 andPLATE-2) are not shown in FIG. 16 in order to simplify the drawing, butmay be included in some applications.

FIG. 17 shows a region of another example integrated memory assembly 10d. Such region includes a portion of the memory array DECK-A having the2T-1C memory cell MC-A1, and includes a portion of the memory arrayDECK-B having the 2T-1C memory cell MC-B1. The conductive lines 30 and32 of the bitline isolation circuitries BL-ISO-A and BL-ISO-B are shownto comprise conductive material 90. The conductive material 90 maycomprise any suitable composition or combination of compositions, suchas, for example, one or more of various metals (e.g., titanium,tungsten, cobalt, nickel, platinum, etc.), metal-containing compositions(e.g., metal silicide, metal nitride, metal carbide, etc.), and/orconductively-doped semiconductor materials (e.g., conductively-dopedsilicon, conductively-doped germanium, etc.). The conductive material 90of the bitline isolation circuitries BL-ISO-A and BL-ISO-B may be thesame composition as the conductive material 22 of the wordlines and/orthe same composition as the conductive material 28 of the bitlines insome embodiments, and may be a different composition than one or both ofthe conductive materials 22 and 28 in other embodiments.

In the embodiment of FIG. 17, the memory arrays of DECKs A and B extendsubstantially horizontally (with the term “substantially horizontally”meaning horizontal to within reasonable tolerances of fabrication andmeasurement), and the conductive material 90 of the conductive lines 30and 32 also extends substantially horizontally.

The transistors 20 of the bitline isolation circuitries (BL-ISO-A andBL-ISO-B) comprise semiconductor material 24 extending through theconductive material 90, comprise gates 92 within the conductive material90, and comprise channel regions 93 within the semiconductor material 24and along the gates 92. In the illustrated embodiment, the channelregions 93 extend substantially vertically through the conductivematerial 90 of the lines 30 and 32. Source/drain regions 101 and 103 areon opposing sides of the channel regions 93.

In some embodiments, the conductive lines 30 and 32 of bitline isolationcircuitries BL-ISO-A and BL-ISO-B may be referred to as first and secondconductive lines, respectively; and the conductive material 90 withinthe first conductive line 30 may be referred to as first conductivematerial, while the conductive material 90 within the second conductiveline 32 is referred to as second conductive material. The firstconductive material within the first conductive line 30 is coupled witha first isolation driver (BL-ISO-A DRIVER), and the second conductivematerial within the second conductive line 32 is coupled with a secondisolation driver (BL-ISO-B DRIVER).

The isolation circuitries BL-ISO-A and BL-ISO-B are vertically stackedone atop another in the shown embodiment, but may be provided in otherarrangements in other embodiments.

FIG. 17 may be considered to show a portion of an example embodiment ofthe FIG. 7 structure. The illustrated portion shows circuitry associatedwith transferring electrical signals between comparative bitlines(BL-T-A1, BL-C-A1, BL-T-B1 and BL-C-B1) of a couple of stacked memorycells (MC-A1 and MC-B1) and the first sense amplifier (SA1). Additionalstructures may be provided to include other memory array decks, othermemory cells, other sense amplifiers, other wordlines, etc. The memorycells of FIG. 17 are shown to be in 2T-1C configurations, but in otherembodiments may be in any other suitable configurations; including, forexample 2T-2C configurations, 3T-1C configurations, etc.

FIG. 18 shows another example integrated memory assembly 10 e, with suchassembly having stacked memory array decks (DECK-A and DECK-B). Each ofthe stacked memory array decks has an array on the left side of ahierarchical bitline path (HBL-T1) and an array on the right side of thehierarchical bitline path (HBL-T1); with the arrays on the left sidebeing labeled as DECK-A (LEFT) and DECK-B (LEFT), and the arrays on theright side being labeled as DECK-A (RIGHT) and DECK-B (RIGHT). Each ofthe arrays includes multiple memory cells (e.g., MC-A(1-4) andMC-B(1-4)).

Comparative bitlines (BL-T-A1 (LEFT), BL-T-A1 (RIGHT), BL-T-B1 (LEFT)and BL-T-B1 (RIGHT)) extend across the arrays to bitline isolationcircuitry (BL-ISO-A (LEFT), BL-ISO-A (RIGHT), BL-ISO-B (LEFT) andBL-ISO-B (RIGHT)) of the type described above with reference to FIG. 9.Notably, each bitline isolation circuitry (BL-ISO-A (LEFT), BL-ISO-A(RIGHT), BL-ISO-B (LEFT) and BL-ISO-B (RIGHT)) includes a series oftransistors 20 in parallel, with the number of transistors beingbalanced with the number of memory cells on an attached bitline (e.g.,line BL-T-A1 (LEFT) is shown to have 4 memory cells (MC-A(1-4)), and theisolation circuitry BL-ISO-A (LEFT) has four transistors 20).

In some applications, each of the bitline isolation circuitries(BL-ISO-A (LEFT), BL-ISO-A (RIGHT), BL-ISO-B (LEFT) and BL-ISO-B(RIGHT)) may be considered to include a multiplexer (mux).

The transistors 20 of FIG. 18 are similar to the transistors 20 of FIG.17, and include channel regions 93 (only some of which are labeled inFIG. 18) extending substantially vertically through the conductivematerial 90 of the lines 30 (LEFT and RIGHT) and 32 (LEFT and RIGHT);with the channel regions 93 being between source/drain regions 101 and103 (only some of which are labeled in FIG. 18).

The memory cells (e.g., MC-A(1-4)) are shown to comprise capacitors Ccoupled with transistors T1. The transistors may be along wordlines WL(only one of which is labeled) which comprise gates of the transistors.

FIG. 18 may be considered to show a portion of an example embodiment ofthe FIG. 7 structure. The illustrated portion shows circuitry associatedwith transferring electrical signals between comparative bitlines(BL-T-A1 (LEFT), BL-T-A1 (RIGHT), BL-T-B1 (LEFT) and BL-T-B1 (RIGHT))and the first sense amplifier (SA1). Additional structures may beprovided to include other bitlines (e.g., the BL-C bitlines), othermemory cells, other sense amplifiers, other wordlines, other memoryarray decks, etc. Additionally, controlled-voltage plates (e.g., PLATE-1and PLATE-2 of FIG. 7) may be provided together with appropriatecircuitry. The memory cells (e.g., MC-A(1-4)) of FIG. 18 may be in anysuitable configurations, including, for example 2T-1C configurations,2T-2C configurations, 3T-1C configurations, etc.

FIG. 19 shows another example integrated memory assembly 10 f, with suchassembly having stacked memory array decks (DECK-A and DECK-B) of a DRAMarchitecture with an open bitline arrangement. Each of the stacked deckshas an array on the left with a comparative bitline (BL-T1, BL-T2) whichis coupled with a hierarchical bitline path (HBL-T1), and has an arrayon the right with a comparative bitline (BL-C1, BL-C2) which is coupledwith a hierarchical bitline path (HBL-C1). The arrays on the left sideare labeled as DECK-A (LEFT) and DECK-B (LEFT), and the arrays on theright side are labeled as DECK-A (RIGHT) and DECK-B (RIGHT). Each of thearrays includes multiple memory cells (e.g., MC-A(1-4) and MC-B(1-4)).

The paths HBL-T1 and HBL-C1 extend to a sense amplifier SA1.

Each of the comparative bitlines (BL-T1, BL-T2, BL-C1 and BL-C2) extendsto bitline isolation circuitry (BL-ISO-A (LEFT), BL-ISO-A (RIGHT),BL-ISO-B (LEFT) and BL-ISO-B (RIGHT)) of the type described above withreference to FIG. 9. Notably, each of the bitline isolation circuitries(BL-ISO-A (LEFT), BL-ISO-A (RIGHT), BL-ISO-B (LEFT) and BL-ISO-B(RIGHT)) includes a series of transistors 20 in parallel, with thenumber of transistors being balanced with the number of memory cells onan attached bitline (e.g., line BL-T1 is shown to have 4 memory cells(MC-A(1-4)), and the isolation circuitry BL-ISO-A (LEFT) has fourtransistors 20).

The transistors 20 of FIG. 19 are similar to the transistors 20 of FIG.17, and include channel regions 93 (only some of which are labeled)extending substantially vertically through the conductive material 90;with the channel regions 93 being between source/drain regions 101 and103 (only some of which are labeled).

The memory cells (e.g., MC-A(1-4)) of FIG. 19 may be in any suitableconfigurations, including, for example 1T-1C configurations, 2T-1Cconfigurations, 2T-2C configurations, 3T-1C configurations, etc. Thememory cells (e.g., MC-A(1-4)) are shown to comprise capacitors Ccoupled with transistors T. The transistors may be along wordlines WL(only one of which is labeled) which comprise gates of the transistors.

FIG. 20 shows another example integrated memory assembly 10 g, with suchassembly having stacked memory array decks (DECK-A and DECK-B). Each ofthe stacked decks has an array on the left of a hierarchical bitlinepath (HBL-T1) and an array on the right side of the hierarchical bitlinepath (HBL-T1); with the arrays on the left side being labeled as DECK-A(LEFT) and DECK-B (LEFT), and the arrays on the right side being labeledas DECK-A (RIGHT) and DECK-B (RIGHT). Each of the arrays includesmultiple memory cells (e.g., MC-A(1-4) and MC-B(1-4)).

The comparative bitlines (BL-T-A1 (LEFT), BL-T-A1 (RIGHT), BL-T-B1(LEFT) and BL-T-B1 (RIGHT)) extend to bitline isolation circuitry(BL-ISO-A (LEFT), BL-ISO-A (RIGHT), BL-ISO-B (LEFT) and BL-ISO-B(RIGHT)) of the type described above with reference to FIG. 9. Notably,each bitline isolation circuitry (BL-ISO-A (LEFT), BL-ISO-A (RIGHT),BL-ISO-B (LEFT) and BL-ISO-B (RIGHT)) includes a series of transistors20 in parallel, with the number of transistors being balanced with thenumber of memory cells on an attached bitline (e.g., line BL-T-A1 (LEFT)is shown to have 4 memory cells (MC-A(1-4)), and the isolation circuitryBL-ISO-A (LEFT) has four transistors 20).

The transistors 20 of FIG. 20 are similar to the transistors 20 of FIG.17, and include channel regions 93 (only some of which are labeled)extending substantially vertically through the conductive material 90 ofthe lines 30 and 32; with the channel regions 93 being betweensource/drain regions 101 and 103 (only some of which are labeled).

The memory cells (e.g., MC-A(1-4)) are shown to comprise capacitors Ccoupled with transistors T1. The transistors may be along wordlines WL(only one of which is labeled) which comprise gates of the transistors.

FIG. 20 may be considered to show a portion of an example embodiment ofthe FIG. 7 structure. The illustrated portion shows circuitry associatedwith transferring electrical signals between comparative bitlines(BL-T-A1 (LEFT), BL-T-A1 (RIGHT), BL-T-B1 (LEFT) and BL-T-B1 (RIGHT))and the first sense amplifier (SA1). Additional structures may beprovided to include other bitlines (e.g., the BL-C bitlines), othermemory cells, other sense amplifiers, other wordlines, other memoryarray decks, etc. Additionally, controlled-voltage plates (e.g., PLATE-1and PLATE-2 of FIG. 7) may be provided together with appropriatecircuitry. The memory cells of FIG. 20 may be in any suitableconfigurations, including, for example 2T-1C configurations, 2T-2Cconfigurations, 3T-1C configurations, etc.

FIG. 21 shows another example integrated memory assembly 10 h, with suchassembly having stacked memory array decks (DECK-A and DECK-B) of a DRAMarchitecture with an open bitline arrangement. Each of the stacked deckshas an array on the left with a comparative bitline (BL-T1, BL-T2) whichis coupled with a hierarchical bitline path (HBL-T1), and has an arrayon the right with a comparative bitline (BL-C1, BL-C2) which is coupledwith a hierarchical bitline path (HBL-C1). The arrays on the left sideare labeled as DECK-A (LEFT) and DECK-B (LEFT), and the arrays on theright side are labeled as DECK-A (RIGHT) and DECK-B (RIGHT). Each of thearrays includes multiple memory cells (e.g., MC-A(1-4) and MC-B(1-4)).

The paths HBL-T1 and HBL-C1 extend to a sense amplifier SA1.

Each of the comparative bitlines (BL-T1, BL-T2, BL-C1 and BL-C2) extendsto bitline isolation circuitry (BL-ISO-A (LEFT), BL-ISO-A (RIGHT),BL-ISO-B (LEFT) and BL-ISO-B (RIGHT)) of the type described above withreference to FIG. 9. Notably, each bitline isolation circuitry (BL-ISO-A(LEFT), BL-ISO-A (RIGHT), BL-ISO-B (LEFT) and BL-ISO-B (RIGHT)) includesa series of transistors 20 in parallel, with the number of transistorsbeing balanced with the number of memory cells on an attached bitline(e.g., line BL-T1 is shown to have 4 memory cells (MC-A(1-4)), and theisolation circuitry BL-ISO-A (LEFT) has four transistors 20).

The transistors 20 of FIG. 21 are similar to the transistors 20 of FIG.17, and include channel regions 93 (only some of which are labeled)extending substantially vertically through the conductive material 90;with the channel regions 93 being between source/drain regions 101 and103 (only some of which are labeled).

The memory cells of FIG. 21 may be in any suitable configurations,including, for example 1T-1C configurations, 2T-1C configurations, 2T-2Cconfigurations, 3T-1C configurations, etc. The memory cells (e.g.,MC-A(1-4)) are shown to comprise capacitors C coupled with transistorsT. The transistors may be along wordlines WL (only one of which islabeled) which comprise gates of the transistors.

FIG. 22 shows another example integrated memory assembly 10 i, with suchassembly having stacked memory array decks (DECK-A and DECK-B) which aremirrored across a central plane 85 between them, and with the DECKs Aand B sharing bitlines (BL-T-A1/BL-T-B1 (LEFT) and (RIGHT)). Each of thestacked decks has an array on the left of a hierarchical bitline path(HBL-T1) and an array on the right side of the hierarchical bitline path(HBL-T1); with the arrays on the left side being labeled as DECK-A(LEFT) and DECK-B (LEFT), and the arrays on the right side being labeledas DECK-A (RIGHT) and DECK-B (RIGHT). Each of the arrays includesmultiple memory cells (e.g., MC-A(1-4) and MC-B(1-4)).

The comparative bitlines (BL-T-A1/BL-T-B1 (LEFT) and BL-T-A1/BL-T-B1(RIGHT)) extend to bitline isolation circuitry (BL-ISO-A (LEFT),BL-ISO-A (RIGHT), BL-ISO-B (LEFT) and BL-ISO-B (RIGHT)) of the typedescribed above with reference to FIG. 9. Notably, each bitlineisolation circuitry (BL-ISO-A (LEFT), BL-ISO-A (RIGHT), BL-ISO-B (LEFT)and BL-ISO-B (RIGHT)) includes a series of transistors 20 in parallel,with the number of transistors being balanced with the number of memorycells on an attached bitline (e.g., line DECK-A (LEFT) is shown to have4 memory cells (MC-A(1-4)), and the isolation circuitry BL-ISO-A (LEFT)has four transistors 20).

The transistors 20 of FIG. 22 are similar to the transistors 20 of FIG.17, and include channel regions 93 (only some of which are labeled)extending substantially vertically through the conductive material 90 ofthe lines 30 and 32; with the channel regions 93 being betweensource/drain regions 101 and 103 (only some of which are labeled).

The memory cells (e.g., MC-A(1-4)) are shown to comprise capacitors Ccoupled with transistors T1. The transistors may be along wordlines WL(only one of which is labeled) which comprise gates of the transistors.

FIG. 22 may be considered to show a portion of an example embodiment ofthe FIG. 7 structure. The illustrated portion shows circuitry associatedwith conducting electrical signals between comparative bitlines(BL-T-A1/BL-T-B1 (LEFT), BL-T-A1/BL-T-B1(RIGHT)) and the first senseamplifier (SA1). Additional structures may be provided to include otherbitlines (e.g., the BL-C bitlines), other memory cells, other senseamplifiers, other wordlines, other memory decks, etc. Additionally,controlled-voltage plates (e.g., PLATE-1 and PLATE-2 of FIG. 7) may beprovided together with appropriate circuitry. The memory cells of FIG.22 may be in any suitable configurations, including, for example 2T-1Cconfigurations, 2T-2C configurations, 3T-1C configurations, etc.

FIG. 23 shows another example integrated memory assembly 10 j, with suchassembly having stacked memory array decks (DECK-A, DECK-B, DECK-C andDECK-D), and with the DECKs A and B sharing bitlines (BL-T-A1/BL-T-B1(LEFT) and (RIGHT)); and with the DECKs C and D sharing bitlines(BL-T-C1/BL-T-D1 (LEFT) and (RIGHT)). Each of the stacked decks has anarray on the left of a hierarchical bitline path (HBL-T1) and an arrayon the right side of the hierarchical bitline path (HBL-T1); with thearrays on the left side being labeled as DECK-A (LEFT) and DECK-B(LEFT), and the arrays on the right side being labeled as DECK-A (RIGHT)and DECK-B (RIGHT). Each of the arrays includes multiple memory cells(e.g., MC-A(1-4) and MC-B(1-4)).

The comparative bitlines (BL-T-A1/BL-T-B1 (LEFT),BL-T-A1/BL-T-B1(RIGHT), BL-T-C1/BL-T-D1 (LEFT), BL-T-C1/BL-T-D1(RIGHT))extend to bitline isolation circuitry (BL-ISO-A (LEFT), BL-ISO-A(RIGHT), BL-ISO-B (LEFT), BL-ISO-B (RIGHT), BL-ISO-C (LEFT), BL-ISO-C(RIGHT), BL-ISO-D (LEFT) and BL-ISO-D (RIGHT)) of the type describedabove with reference to FIG. 9. Notably, each bitline isolationcircuitry (BL-ISO-A (LEFT), BL-ISO-A RIGHT), BL-ISO-B (LEFT), BL-ISO-B(RIGHT), BL-ISO-C (LEFT), BL-ISO-C (RIGHT), BL-ISO-D (LEFT) and BL-ISO-D(RIGHT)) includes a series of transistors 20 in parallel, with thenumber of transistors being balanced with the number of memory cells onan attached bitline (e.g., line DECK-A (LEFT) is shown to have 4 memorycells (MC-A(1-4)), and the isolation circuitry BL-ISO-A (LEFT) has fourtransistors 20).

The transistors 20 of FIG. 23 are similar to the transistors 20 of FIG.17, and include channel regions 93 (only some of which are labeled)extending substantially vertically through the conductive material 90;with the channel regions 93 being between source/drain regions 101 and103 (only some of which are labeled).

The memory cells (e.g., MC-A(1-4)) are shown to comprise capacitors Ccoupled with transistors T1. The transistors may be along wordlines WL(only one of which is labeled) which comprise gates of the transistors.

FIG. 23 may be considered to show a portion of an example embodiment ofthe FIG. 7 structure. The illustrated portion shows circuitry associatedwith conducting electrical signals between comparative bitlines(BL-T-A1/BL-T-B1 (LEFT), BL-T-A1/BL-T-B1(RIGHT), BL-T-C1/BL-T-D1 (LEFT),BL-T-C1/BL-T-D1(RIGHT)) and the first sense amplifier (SA1). Additionalstructures may be provided to include other bitlines (e.g., the BL-Cbitlines), other memory cells, other sense amplifiers, other wordlines,other memory decks, etc. Additionally, controlled-voltage plates (e.g.,PLATE-1 and PLATE-2 of FIG. 7) may be provided together with appropriatecircuitry. The memory cells of FIG. 23 may be in any suitableconfigurations, including, for example 2T-1C configurations, 2T-2Cconfigurations, 3T-1C configurations, etc.

FIG. 24 shows another example integrated memory assembly 10 k, with suchassembly having stacked memory array decks (DECK-A and DECK-B). Each ofthe stacked decks has an array on the left of a hierarchical wordlinepath (HWL-1) and an array on the right side of the hierarchical wordlinepath (HWL-1); with the arrays on the left side being labeled as DECK-A(LEFT) and DECK-B (LEFT), and the arrays on the right side being labeledas DECK-A (RIGHT) and DECK-B (RIGHT). Each of the arrays includes memorycells (e.g., MC-A1 and MC-B1).

Wordlines (WL-A1 (LEFT), WL-A1 (RIGHT), WL-B1 (LEFT) and WL-B1 (RIGHT))extend across the arrays to wordline isolation circuitry (WL-ISO-A(LEFT), WL-ISO-A (RIGHT), WL-ISO-B (LEFT) and WL-ISO-B (RIGHT)) of thetype described above with reference to FIG. 10. The wordline isolationcircuitries (WL-ISO-A (LEFT), WL-ISO-A (RIGHT), WL-ISO-B (LEFT) andWL-ISO-B (RIGHT)) comprise paired transistors 20; with one of thetransistors being labeled TX and the other being labeled TY. Suchtransistors may be PMOS devices and/or NMOS devices. In someembodiments, it may be advantageous for one of the paired transistors TXand TY to be a PMOS device while the other is an NMOS device.

In some applications, each of the wordline isolation circuitries (e.g.,WL-ISO-A (LEFT)) may be considered to include a multiplexer (mux).

The transistors 20 of FIG. 24 are similar to the transistors 20 of FIG.17, and include channel regions 93 (only some of which are labeled)extending substantially vertically through the conductive material 90 oflines 42 and 43; with the channel regions 93 being between source/drainregions 101 and 103 (only some of which are labeled). In the illustratedembodiment, the lines 42 and 43 extend substantially horizontally (as dothe memory arrays of DECKs A and B), and the channel regions 93 extendsubstantially vertically through the conductive material 90 of the lines42 and 43.

In some embodiments, the conductive lines 42 and 43 of wordlineisolation circuitries WL-ISO-A (LEFT and RIGHT) and WL-ISO-B (LEFT andRIGHT) may be referred to as first and second conductive lines,respectively; and the conductive material 90 within the first conductiveline 42 (LEFT and RIGHT) may be referred to as first conductivematerial, while the conductive material 90 within the second conductiveline 43 (LEFT and RIGHT) is referred to as second conductive material.The first conductive material within the first conductive line 42 (LEFTand RIGHT) is coupled with first isolation drivers (WL-ISO-A DRIVER LEFTand WL-ISO-A DRIVER RIGHT), and the second conductive material withinthe second conductive line 43 (LEFT and RIGHT) is coupled with a secondisolation drivers (WL-ISO-B DRIVER LEFT and WL-ISO-B DRIVER RIGHT).

FIG. 24 may be considered to show a portion of an example embodiment ofthe FIG. 7 structure. The illustrated portion shows circuitry associatedwith conducting electrical signals between comparative wordlines (WL-A1(LEFT), WL-A1 (RIGHT), WL-B1 (LEFT) and WL-B1 (RIGHT)) and the wordlinedriver (WL-D1). Additional structures may be provided to include otherwordlines, other memory cells, other bitlines, sense amplifiers, othermemory decks, etc. Additionally, controlled-voltage plates (e.g.,PLATE-1 and PLATE-2 of FIG. 7) may be provided together with appropriatecircuitry. The memory cells of FIG. 24 may be in any suitableconfigurations, including, for example 2T-1C configurations, 2T-2Cconfigurations, 3T-1C configurations, etc.

The structures and architectures discussed above may be incorporatedinto electronic systems. Such electronic systems may be used in, forexample, memory modules, device drivers, power modules, communicationmodems, processor modules, and application-specific modules, and mayinclude multilayer, multichip modules. The electronic systems may be anyof a broad range of systems, such as, for example, cameras, wirelessdevices, displays, chip sets, set top boxes, games, lighting, vehicles,clocks, televisions, cell phones, personal computers, automobiles,industrial control systems, aircraft, etc.

Unless specified otherwise, the various materials, substances,compositions, etc. described herein may be formed with any suitablemethodologies, either now known or yet to be developed, including, forexample, atomic layer deposition (ALD), chemical vapor deposition (CVD),physical vapor deposition (PVD), etc.

Both of the terms “dielectric” and “electrically insulative” may beutilized to describe materials having insulative electrical properties.The terms are considered synonymous in this disclosure. The utilizationof the term “dielectric” in some instances, and the term “electricallyinsulative” in other instances, may be to provide language variationwithin this disclosure to simplify antecedent basis within the claimsthat follow, and is not utilized to indicate any significant chemical orelectrical differences.

The particular orientation of the various embodiments in the drawings isfor illustrative purposes only, and the embodiments may be rotatedrelative to the shown orientations in some applications. The descriptionprovided herein, and the claims that follow, pertain to any structuresthat have the described relationships between various features,regardless of whether the structures are in the particular orientationof the drawings, or are rotated relative to such orientation.

The cross-sectional views of the accompanying illustrations only showfeatures within the planes of the cross-sections, and do not showmaterials behind the planes of the cross-sections in order to simplifythe drawings.

When a structure is referred to above as being “on” or “against” anotherstructure, it can be directly on the other structure or interveningstructures may also be present. In contrast, when a structure isreferred to as being “directly on” or “directly against” anotherstructure, there are no intervening structures present.

Structures (e.g., layers, materials, etc.) may be referred to as“extending vertically” to indicate that the structures generally extendupwardly from an underlying base (e.g., substrate). Thevertically-extending structures may extend substantially orthogonallyrelative to an upper surface of the base, or not.

Some embodiments include an integrated memory assembly comprising afirst memory array deck over a second memory array deck. A first seriesof conductive lines extends across the first memory array deck, and asecond series of conductive lines extends across the second memory arraydeck. A first conductive line of the first series and a first conductiveline of the second series are coupled with a first component through afirst conductive path. A second conductive line of the first series anda second conductive line of the second series are coupled with a secondcomponent through a second conductive path. The first and secondconductive lines of the first series extend through first isolationcircuitry to the first and second conductive paths, respectively. Thefirst isolation circuitry includes a first transistor which gatedlyconnects the first conductive line of the first series to the firstconductive path, and includes a second transistor which gatedly connectsthe second conductive line of the first series to the second conductivepath. The gates of the first and second transistors are coupled with afirst isolation driver. The first and second conductive lines of thesecond series extend through second isolation circuitry to the first andsecond conductive paths, respectively. The second isolation circuitryincludes a third transistor which gatedly connects the first conductiveline of the second series to the first conductive path, and includes afourth transistor which gatedly connects the second conductive line ofthe second series to the second conductive path. The gates of the thirdand fourth transistors are coupled with a second isolation driver.

Some embodiments include an integrated memory assembly comprising afirst memory array deck A over a second memory array deck B. A firstseries of bitlines is along the first memory array deck A, and includespaired comparative bitlines BL-T-A1 and BL-C-A1, and paired comparativebitlines BL-T-A2 and BL-C-A2. A second series of bitlines is along thesecond memory array deck B, and including paired comparative bitlinesBL-T-B1 and BL-C-B1, and paired comparative bitlines BL-T-B2 andBL-C-B2. The paired comparative bitlines BL-T-A1 and BL-C-A1 are coupledwith a first sense amplifier through a first BL-T conductive path and afirst BL-C conductive path, respectively. The paired comparativebitlines BL-T-A2 and BL-C-A2 are coupled with a second sense amplifierthrough a second BL-T conductive path and a second BL-C conductive path,respectively. The paired comparative bitlines BL-T-B1 and BL-C-B1 arecoupled with the first sense amplifier through the first BL-T conductivepath and the first BL-C conductive path, respectively. The pairedcomparative bitlines BL-T-B2 and BL-C-B2 are coupled with the secondsense amplifier through the second BL-T conductive path and the secondBL-C conductive path, respectively. The bitlines BL-T-A1, BL-C-A1,BL-T-A2 and BL-C-A2 extend through first isolation circuitry to thefirst BL-T conductive path, the first BL-C conductive path, the secondBL-T conductive path and the second BL-C conductive path, respectively.The first isolation circuitry includes a first transistor which gatedlyconnects BL-T-A1 to the first BL-T conductive path, a second transistorwhich gatedly connects BL-C-A1 to the first BL-C conductive path, athird transistor which gatedly connects BL-T-A2 to the second BL-Tconductive path, and a fourth transistor which gatedly connects BL-C-A2to the second BL-C conductive path. The gates of the first, second,third and fourth second transistors are coupled with a first bitlineisolation driver. The bitlines BL-T-B1, BL-C-B1, BL-T-B2 and BL-C-B2extend through second isolation circuitry to the first BL-T conductivepath, the first BL-C conductive path, the second BL-T conductive pathand the second BL-C conductive path, respectively. The second isolationcircuitry includes a fifth transistor which gatedly connects BL-T-B1 tothe first BL-T conductive path, a sixth transistor which gatedlyconnects BL-C-B1 to the first BL-C conductive path, a seventh transistorwhich gatedly connects BL-T-B2 to the second BL-T conductive path, andan eighth transistor which gatedly connects BL-C-B2 to the second BL-Cconductive path. The gates of the fifth, sixth, seventh and eighthtransistors are coupled with a second bitline isolation driver.

Some embodiments include an integrated memory assembly comprising afirst memory array deck A over a second memory array deck B. A firstseries of wordlines is along the first memory array deck A, and includeswordlines WL-A1 and WL-A2. A second series of wordlines is along thesecond memory array deck B, and includes wordlines WL-B1 and WL-B2. Thewordlines W1-A1 and WL-B1 are coupled with a first wordline driverthrough a first conductive path. The wordlines WL-A2 and WL-B2 arecoupled with a second wordline driver through a second conductive path.The wordlines WL-A1 and WL-A2 extend through first isolation circuitryto the first and second conductive paths, respectively. The firstisolation circuitry includes a first transistor which gatedly connectsWL-A1 to the first conductive path, and includes a second transistorwhich gatedly connects WL-A2 to the second conductive path. The gates ofthe first and second transistors are coupled with a first wordlineisolation driver. The wordlines WL-B1 and WL-B2 extend through secondisolation circuitry to the first and second conductive paths,respectively. The second isolation circuitry includes a third transistorwhich gatedly connects WL-B1 to the first conductive path, and includesa fourth transistor which gatedly connects of WL-B2 to the secondconductive path. The gates of the third and fourth transistors arecoupled with a second wordline isolation driver.

Some embodiments include an integrated memory assembly comprising afirst memory array deck A over a second memory array deck B. A first setof conductive lines extends across the first memory array deck A. Thefirst set of conductive lines comprises a first series of wordlines anda first series of bitlines. The wordlines of the first series include awordline WL-A1 and a wordline WL-A2. The bitlines of the first seriesinclude paired comparative bitlines BL-T-A1 and BL-C-A1, and pairedcomparative bitlines BL-T-A2 and BL-C-A2. A second set of conductivelines extends across the second memory array deck B. The second set ofconductive lines comprises a second series of wordlines and a secondseries of bitlines. The wordlines of the second series include awordline WL-B1 and a wordline WL-B2. The bitlines of the second seriesincluding paired comparative bitlines BL-T-B1 and BL-C-B1, and pairedcomparative bitlines BL-T-B2 and BL-C-B2. The wordlines W1-A1 and WL-B1are coupled with a first wordline driver through a first wordlineconductive path. The wordlines WL-A2 and WL-B2 are coupled with a secondwordline driver through a second wordline conductive path. The wordlinesWL-A1 and WL-A2 extend through first wordline isolation circuitry to thefirst and second wordline conductive paths, respectively. The firstwordline isolation circuitry includes a first transistor which gatedlyconnects WL-A1 to the first wordline conductive path, and includes asecond transistor which gatedly connects WL-A2 to the second wordlineconductive path. The gates of the first and second transistors arecoupled with a first wordline isolation driver. The wordlines WL-B1 andWL-B2 extend through second wordline isolation circuitry to the firstand second wordline conductive paths, respectively. The second wordlineisolation circuitry includes a third transistor which gatedly connectsWL-B1 to the first wordline conductive path, and includes a fourthtransistor which gatedly connects WL-B2 to the second wordlineconductive path. The gates of the third and fourth transistors arecoupled with a second wordline isolation driver. The paired comparativebitlines BL-T-A1 and BL-C-A1 are coupled with a first sense amplifierthrough a first BL-T conductive path and a first BL-C conductive path,respectively; and the paired comparative bitlines BL-T-A2 and BL-C-A2are coupled with a second sense amplifier through a second BL-Tconductive path and a second BL-C conductive path, respectively. Thepaired comparative bitlines BL-T-B1 and BL-C-B1 are coupled with thefirst sense amplifier through the first BL-T conductive path and thefirst BL-C conductive path, respectively; and the paired comparativebitlines BL-T-B2 and BL-C-B2 are coupled with the second sense amplifierthrough the second BL-T conductive path and the second BL-C conductivepath, respectively. The bitlines BL-T-A1, BL-C-A1, BL-T-A2 and BL-C-A2extend through first bitline isolation circuitry to the first BL-Tconductive path, the first BL-C conductive path, the second BL-Tconductive path and the second BL-C conductive path, respectively. Thefirst bitline isolation circuitry includes a fifth transistor whichgatedly connects BL-T-A1 to the first BL-T conductive path, a sixthtransistor which gatedly connects BL-C-A1 to the first BL-C conductivepath, a seventh transistor which gatedly connects BL-T-A2 to the secondBL-T conductive path, and an eighth transistor which gatedly connectsBL-C-A2 to the second BL-C conductive path. The gates of the fifth,sixth, seventh and eighth transistors are coupled with a first bitlineisolation driver. The bitlines BL-T-B1, BL-C-B1, BL-T-B2 and BL-C-B2extend through second bitline isolation circuitry to the first BL-Tconductive path, the first BL-C conductive path, the second BL-Tconductive path and the second BL-C conductive path, respectively. Thesecond bitline isolation circuitry includes a ninth transistor whichgatedly connects BL-T-B1 to the first BL-T conductive path, a tenthtransistor which gatedly connects BL-C-B1 to the first BL-C conductivepath, an eleventh transistor which gatedly connects BL-T-B2 to thesecond BL-T conductive path, and a twelfth transistor which gatedlyconnects BL-C-B2 to the second BL-C conductive path. The gates of theninth, tenth, eleventh and twelfth transistors are coupled with a secondbitline isolation driver.

In compliance with the statute, the subject matter disclosed herein hasbeen described in language more or less specific as to structural andmethodical features. It is to be understood, however, that the claimsare not limited to the specific features shown and described, since themeans herein disclosed comprise example embodiments. The claims are thusto be afforded full scope as literally worded, and to be appropriatelyinterpreted in accordance with the doctrine of equivalents.

We claim:
 1. An integrated memory assembly, comprising: a first memoryarray deck over a second memory array deck; a first series of conductivelines extending across the first memory array deck, and a second seriesof conductive lines extending across the second memory array deck; afirst conductive line of the first series and a first conductive line ofthe second series being coupled with a first component through a firstconductive path; a second conductive line of the first series and asecond conductive line of the second series being coupled with a secondcomponent through a second conductive path; and the first and secondconductive lines of the first series extending through first isolationcircuitry to the first and second conductive paths, respectively; thefirst isolation circuitry including a first transistor which gatedlyconnects the first conductive line of the first series to the firstconductive path, and including a second transistor which gatedlyconnects the second conductive line of the first series to the secondconductive path; the gates of the first and second transistors beingcoupled with a first isolation driver.
 2. The integrated memory assemblyof claim 1, wherein the first and second conductive lines of the secondseries extending through second isolation circuitry to the first andsecond conductive paths, respectively.
 3. The integrated memory assemblyof claim 2, wherein the second isolation circuitry includes a thirdtransistor which gatedly connects the first conductive line of thesecond series to the first conductive path.
 4. The integrated memoryassembly of claim 3, wherein the second isolation circuitry furtherincludes a fourth transistor which gatedly connects the secondconductive line of the second series to the second conductive path. 5.The integrated memory assembly of claim 4, further comprising a secondisolation driver.
 6. The integrated memory assembly of claim 1 whereinthe conductive lines of the first and second series are wordlines. 7.The integrated memory assembly of claim 1 wherein the conductive linesof the first and second series are bitlines.
 8. The integrated memoryassembly of claim 1 wherein the conductive lines of the first and secondseries are bitlines; and further comprising: a third series ofconductive lines extending across the first memory array deck, and afourth series of conductive lines extending across the second memoryarray deck; the conductive lines of the third and fourth series beingwordlines.
 9. The integrated memory assembly of claim 8, wherein a firstconductive line of the third series and a first conductive line of thefourth series are coupled with a first wordline driver through a thirdconductive path; and a second conductive line of the third series and asecond conductive line of the fourth series are coupled with a secondwordline driver through a fourth conductive path.
 10. The integratedmemory assembly of claim 1 wherein the first and second memory arraydecks include 1T-1C memory cells.
 11. The integrated memory assembly ofclaim 1 wherein the first and second memory array decks include 2T-2Cmemory cells.
 12. The integrated memory assembly of claim 1 wherein thefirst and second memory array decks include 3T-1C memory cells.
 13. Theintegrated memory assembly of claim 1 wherein the first and secondmemory array decks include 2T-1C memory cells.
 14. An integrated memoryassembly, comprising: a first memory array deck A over a second memoryarray deck B; a first series of bitlines along the first memory arraydeck A, and including paired comparative bitlines BL-T-A1 and BL-C-A1,and paired comparative bitlines BL-T-A2 and BL-C-A2; a second series ofbitlines along the second memory array deck B, and including pairedcomparative bitlines BL-T-B1 and BL-C-B1, and paired comparativebitlines BL-T-B2 and BL-C-B2; the paired comparative bitlines BL-T-A1and BL-C-A1 being coupled with a first sense amplifier through a firstBL-T conductive path and a first BL-C conductive path, respectively; thepaired comparative bitlines BL-T-A2 and BL-C-A2 being coupled with asecond sense amplifier through a second BL-T conductive path and asecond BL-C conductive path, respectively; the paired comparativebitlines BL-T-B1 and BL-C-B1 being coupled with the first senseamplifier through the first BL-T conductive path and the first BL-Cconductive path, respectively; the paired comparative bitlines BL-T-B2and BL-C-B2 being coupled with the second sense amplifier through thesecond BL-T conductive path and the second BL-C conductive path,respectively; and the bitlines BL-T-A1 BL-C-A1 BL-T-A2 and BL-C-A2extending through first isolation circuitry to the first BL-T conductivepath, the first BL-C conductive path, the second BL-T conductive pathand the second BL-C conductive path, respectively; the first isolationcircuitry including a first transistor which gatedly connects BL-T-A1 tothe first BL-T conductive path, a second transistor which gatedlyconnects BL-C-A1 to the first BL-C conductive path, a third transistorwhich gatedly connects BL-T-A2 to the second BL-T conductive path, and afourth transistor which gatedly connects BL-C-A2 to the second BL-Cconductive path; the gates of the first, second, third and fourth secondtransistors being coupled with a first bitline isolation driver.
 15. Theintegrated memory assembly of claim 14, wherein the bitlines BL-T-B1,BL-C-B1, BL-T-B2 and BL-C-B2 extend through second isolation circuitryto the first BL-T conductive path, the first BL-C conductive path, thesecond BL-T conductive path and the second BL-C conductive path,respectively.
 16. The integrated memory assembly of claim 15, whereinthe second isolation circuitry includes a fifth transistor which gatedlyconnects BL-T-B1 to the first BL-T conductive path, a sixth transistorwhich gatedly connects BL-C-B1 to the first BL-C conductive path, aseventh transistor which gatedly connects BL-T-B2 to the second BL-Tconductive path, and an eighth transistor which gatedly connects BL-C-B2to the second BL-C conductive path.
 17. The integrated memory assemblyof claim 16, wherein the gates of the fifth, sixth, seventh and eighthtransistors are coupled with a second bitline isolation driver.
 18. Theintegrated memory assembly of claim 14 wherein the first and secondmemory array decks A and B extend horizontally.
 19. The integratedmemory assembly of claim 14, wherein the gates of the first, second,third and fourth transistors are coupled with a first conductive lineextending to the first bitline isolation driver.
 20. The integratedmemory assembly of claim 19, wherein: the gates of the fifth, sixth,seventh and eighth transistors are coupled with a second conductive lineextending to the second bitline isolation driver; the first, second,third and fourth transistors have channel regions extendingsubstantially vertically through the first conductive line; and thefifth, sixth, seventh and eighth transistors have channel regionsextending substantially vertically through the second conductive line.